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        產品中心 > 高效電池生產設備 > 管式等離子體多晶硅薄膜淀積爐

        管式等離子體多晶硅薄膜淀積爐

        設備名稱 Equipment Name

        管式等離子體多晶硅薄膜淀積爐  Horizontal PECVD (poly-Si)

        設備型號 Equipment Model

        PD-520


        設備用途 Equipment Application

        本設備主要用于N-TOPCon電池制備隧穿氧化層、本征poly-si、摻雜poly-si、掩膜層。

        This equipment is mainly used for the deposition of tunnel oxide layer, intrinsic poly-si layer, poly-si layer doping and mask layer for TOPCon solar cells.


        工藝流程  Process Flow

        石墨舟及硅片準備→管內充氮氣→進舟→抽真空、壓力測試→淀積多層復合膜→抽真空、壓力測試→清管路、充氮氣→退舟

        Graphite boat & wafers ready→nitrogen inlet→graphite boat load in→vacuumize, pressure test→multi layers deposition→vacuumize, pressure test→Pipe purging, nitrogen inlet→graphite boat unload


        技術特點  Features

        1、隧穿氧化層、本征poly-Si、摻雜poly-Si、掩膜層,四種工藝薄膜一次原位完成。

        Tunnel oxide layer, intrinsic Poly-Si, doping Poly-Si, mask layer, four processes completed in one in-situ doping.

        2、具備原位清洗功能。
        With in-situ clean. 

        3、雙水冷密封技術。
        Double water-cooled sealing technology.

        4、專利內加熱技術。
        Patented internal heating technology.

        5、高速平穩整體模組推舟機構。
        High-speed integral module boat pushing mechanism.

        6、懸浮承載舟技術。
        Graphite boat contact-free with quartz tube.

        7、自主知識產權MES軟件。
        MES software with independent intellectual property right.

        8、自主開發中央計算機集中控制系統。

        Independently developed CCC system.

        9、快速鍍膜技術。
        Fast coating technology.

        10、全面的防超溫、斷偶、撞舟等安全報警保護功能。

        Alarm protection for over-heating, thermocouple-break and boat collision.


        設備參數  Parameters

        PD520.png



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